Extraction of contact resistivity on Kelvin L-resistor structures

Extraction of contact resistivity on Kelvin L-resistor structures

The D and L-Resistor types of the Kelvin cross resistor are the main test structures used to monitor contact resistance and contact resistivity. Despite the fact that the D type is more sensitive, both are widely used. A procedure is presented for the L type structure which permits the accurate, eas...

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Veröffentlicht in:IEEE transactions on electron devices 1994-06, Vol.41 (6), p.1073-1074
Hauptverfasser: Santander, J., Lozano, M., Cane, C.
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Conductivity
Contact resistance
Doping
Electrical resistance measurement
Electronics
Exact sciences and technology
Fabrication
Kelvin
Monitoring
Ohmic contacts
Resistors
Testing
Testing, measurement, noise and reliability
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Zusammenfassung:The D and L-Resistor types of the Kelvin cross resistor are the main test structures used to monitor contact resistance and contact resistivity. Despite the fact that the D type is more sensitive, both are widely used. A procedure is presented for the L type structure which permits the accurate, easy and fast extraction of contact resistivity, taking into account the effects of spreading currents.< >
ISSN:0018-9383
1557-9646
DOI:10.1109/16.293325