The tacking CCD: a new CCD concept

The tacking CCD is a new type of charge transport mechanism that is suitable for junction- and MOS-type CCDs. A specific form, the trenched tacking CCD (TTCCD), promises high pixel density and high charge handling capability per unit of surface area. The charge handling capability is improved by usi...

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Veröffentlicht in:	IEEE transactions on electron devices 1991-05, Vol.38 (5), p.1193-1200
Hauptverfasser:	Bakker, J.G.C., Esser, L.J.M., Peek, H.L., Sweeney, C.J., Kokshoorn, A.L., Theuwissen, A.J.P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Charge carriers Charge coupled devices Charge transfer Charge transfer devices Delay lines Electrodes Electronics Exact sciences and technology HDTV Image sensors Noise level Optical filters Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Solid state circuits
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Beschreibung
Zusammenfassung:	The tacking CCD is a new type of charge transport mechanism that is suitable for junction- and MOS-type CCDs. A specific form, the trenched tacking CCD (TTCCD), promises high pixel density and high charge handling capability per unit of surface area. The charge handling capability is improved by using a trench to increase the charge storage area. With the new design concept it becomes possible to put the gates entirely into trenches, while simultaneously using the trenches as channel stops. The TTCCD structure is suitable for making new types of solid-state image sensors with increased light sensitivity, and it may be possible to incorporate a vertical overflow drain. First samples of the TTCCD have been realized, and its functionality has been confirmed.< >
ISSN:	0018-9383 1557-9646
DOI:	10.1109/16.78397