Low temperature indium oxide gas sensors

InO x thin films were grown by dc magnetron sputtering. Structural and morphological investigations carried out by XRD and AFM showed a strong correlation between crystallinity, surface topology and ozone sensitivity. The electrical conductivity exhibited a large change of six orders of magnitude du...

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Veröffentlicht in:	Sensors and actuators. B, Chemical Chemical, 2006-10, Vol.118 (1), p.135-141
Hauptverfasser:	Suchea, M., Katsarakis, N., Christoulakis, S., Nikolopoulou, S., Kiriakidis, G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Correlation Direct current Gas sensors Indium oxides InO x Magnetron sputtering Metal oxide thin films Ozone Photochemistry Resistivity
Online-Zugang:	Volltext
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