Low temperature indium oxide gas sensors

Low temperature indium oxide gas sensors

InO x thin films were grown by dc magnetron sputtering. Structural and morphological investigations carried out by XRD and AFM showed a strong correlation between crystallinity, surface topology and ozone sensitivity. The electrical conductivity exhibited a large change of six orders of magnitude du...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Sensors and actuators. B, Chemical Chemical, 2006-10, Vol.118 (1), p.135-141
Hauptverfasser: Suchea, M., Katsarakis, N., Christoulakis, S., Nikolopoulou, S., Kiriakidis, G.
Format: Artikel
Sprache:eng
Schlagworte:
Actuators
Correlation
Direct current
Gas sensors
Indium oxides
InO x
Magnetron sputtering
Metal oxide thin films
Ozone
Photochemistry
Resistivity
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:InO x thin films were grown by dc magnetron sputtering. Structural and morphological investigations carried out by XRD and AFM showed a strong correlation between crystallinity, surface topology and ozone sensitivity. The electrical conductivity exhibited a large change of six orders of magnitude during the processes of photoreduction/oxidation. It was concluded that it is mainly the grain size variation that determines the sensitivity of InO x films against ozone.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2006.04.020