Fabrication of a microlens array using micro-compression molding with an electroformed mold insert

Polymeric microlens arrays, with a diameter of 36-96 microns, a radius of curvature of 20-60 microns and a pitch of 250 microns, were fabricated using micro-compression molding with electroformed mold inserts. We used the reflow method and the electroforming process to make the mother and the metall...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2003-01, Vol.13 (1), p.98-103
Hauptverfasser:	Moon, Su-dong, Lee, Namsuk, Kang, Shinill
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Fabrication techniques lithography, pattern transfer Integrated optics. Optical fibers and wave guides Machinery and processing Miscellaneous Moulding Optical and optoelectronic circuits Plastics Polymer industry, paints, wood Technology of polymers
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Beschreibung
Zusammenfassung:	Polymeric microlens arrays, with a diameter of 36-96 microns, a radius of curvature of 20-60 microns and a pitch of 250 microns, were fabricated using micro-compression molding with electroformed mold inserts. We used the reflow method and the electroforming process to make the mother and the metallic mold inserts, respectively. Micro-compression molding with powder polymer was developed to replicate microlenses. The surface profiles, imaging qualities, and surface roughness of the microlenses were measured and analyzed.
ISSN:	0960-1317 1361-6439
DOI:	10.1088/0960-1317/13/1/314