Research on a Bionic Fuzzy-PID Vibration Control System for Ultra-Precision Device

By imitating the vibration isolation mechanism and special organic texture of woodpecker’s brain, a bionics mechanics-based structure model is constructed for the vibration isolation system of ultra-precision device. In consideration of compound vibration environment and non-linearity of the ultra-precision device, a fuzzy-PID (PID stands for Proportional, Integral and Derivative.) active vibration control system is developed, its operation is that fuzzy control is adopted while the error is big and PID control is adopted while the error is small. The performance of the vibration control system is validated by numerical simulation. The simulation results show that the bionic vibration control system has good performance against floor disturbances and direct disturbing force. It can be applied to the vibration isolation system of the ultra-precision measuring and manufacturing device.