Interfacial studies for improving the adhesion of diamond-like carbon films on steel

The adhesion of diamond-like carbon (DLC) films on steel is usually very poor. Adhesion of DLC on SKD11 steel was improved for tribological purposes in this study by applying chromium (Cr) metal intermediate layers using magnetron sputtering with substrate bias. DLC films were deposited by inductive...

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Veröffentlicht in:	Applied surface science 2005-04, Vol.243 (1), p.296-303
Hauptverfasser:	Chen, Chun-Chin, Hong, Franklin Chau-Nan
Format:	Artikel
Sprache:	eng
Schlagworte:	Adhesion Chromium Condensed matter: structure, mechanical and thermal properties Diamond-like carbon Diffusion interface formation Exact sciences and technology Intermixing layer Ion radiation effects Mechanical and acoustical properties adhesion Physical radiation effects, radiation damage Physics Solid surfaces and solid-solid interfaces Structure of solids and liquids crystallography Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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Beschreibung
Zusammenfassung:	The adhesion of diamond-like carbon (DLC) films on steel is usually very poor. Adhesion of DLC on SKD11 steel was improved for tribological purposes in this study by applying chromium (Cr) metal intermediate layers using magnetron sputtering with substrate bias. DLC films were deposited by inductively coupled plasma (ICP) chemical vapor deposition. However, the adhesion was only at medium level. Intermixing at the Cr–steel interface was further achieved by ion bombardment and found to remarkably improve the adhesion. A reliable process was established to improve the adhesion to top level.
ISSN:	0169-4332 1873-5584
DOI:	10.1016/j.apsusc.2004.09.085