Characterisation of GaN crystals and epilayers grown from a solution at room pressure
GaN crystals were synthesised in a horizontal reactor system using ammonia as a nitrogen source. In the first part of this project a parameter study was performed to evaluate a suitable growth window, concerning e.g. process temperature, gas flows or partial pressures of the process gases. These fir...
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Veröffentlicht in: | Physica status solidi. C 2005-05, Vol.2 (7), p.2040-2043 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | GaN crystals were synthesised in a horizontal reactor system using ammonia as a nitrogen source. In the first part of this project a parameter study was performed to evaluate a suitable growth window, concerning e.g. process temperature, gas flows or partial pressures of the process gases. These first experiments were carried out in a horizontal reactor with a silica ampoule using a quartz crucible. Applying the optimum parameter set it was possible to grow GaN single crystals and free‐standing GaN with a thickness of 0.1 mm. Pure hexagonal GaN was confirmed by XRD and EDX measurements, neither a cubic phase content nor any other binary or ternary phase was found, which is in agreement with the Raman spectroscopy data and the results from cathodoluminescence and PL measurements. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) |
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ISSN: | 1610-1634 1610-1642 |
DOI: | 10.1002/pssc.200461473 |