X-Ray absorption studies of boron–carbon–nitrogen (B xC yN z) ternary alloys

X-Ray diffraction (XRD) and B, N and C K-edges X-ray absorption near-edge structure (XANES) measurements have been performed to study the B x C y N z ternary compounds. XRD reveals that the films contain carbon nitride, boron carbide, and boron nitride compounds. The combination of B, N and C K-edge...

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Veröffentlicht in:Diamond and related materials 2004-04, Vol.13 (4), p.1553-1557
Hauptverfasser: Ray, S.C, Tsai, H.M, Chiou, J.W, Jan, J.C, Kumar, Krishna, Pong, W.F, Chien, F.Z, Tsai, M.-H, Chattopadhyay, S, Chen, L.C, Chien, S.C, Lee, M.T, Lin, S.T, Chen, K.H
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Sprache:eng
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Zusammenfassung:X-Ray diffraction (XRD) and B, N and C K-edges X-ray absorption near-edge structure (XANES) measurements have been performed to study the B x C y N z ternary compounds. XRD reveals that the films contain carbon nitride, boron carbide, and boron nitride compounds. The combination of B, N and C K-edges XANES results reveal the presence of BN, BC, NC, and CN local bonding structures in B x C y N z , indicating that boron–carbon–nitride thin films have a ternary phase, rather than a mixture of segregated binary phases.
ISSN:0925-9635
1879-0062
DOI:10.1016/j.diamond.2003.11.052