Polyimide-planarized vertical-cavity surface-emitting lasers with 17.0-GHz bandwidth

Polyimide-planarized vertical-cavity surface-emitting lasers with 17.0-GHz bandwidth

High-speed oxide-confined polyimide-planarized 850-nm vertical-cavity surface-emitting lasers exhibit -3-dB modulation bandwidths up to 17.0 GHz. The devices are fabricated using a reproducible, simple process incorporating polyimide with good adhesion that does not require implantation or semiinsul...

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Veröffentlicht in:IEEE photonics technology letters 2004-04, Vol.16 (4), p.969-971
Hauptverfasser: AL-Omari, A.N., Lear, K.L.
Format: Artikel
Sprache:eng
Schlagworte:
Adhesion
Bandwidth
Circuits
Devices
High speed
Implantation
Mirrors
Modulation
Optical surface waves
Parasitic capacitance
Polyimide resins
Polyimides
Semiconductor lasers
Substrates
Surface emitting lasers
Vertical cavity surface emission lasers
Vertical cavity surface emitting lasers
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Zusammenfassung:High-speed oxide-confined polyimide-planarized 850-nm vertical-cavity surface-emitting lasers exhibit -3-dB modulation bandwidths up to 17.0 GHz. The devices are fabricated using a reproducible, simple process incorporating polyimide with good adhesion that does not require implantation or semiinsulating substrates to achieve low capacitance.
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2004.824622