CIP (cleaning-in-place) suitable “non-glass” pH sensor based on a Ta2O5-gate EIS structure

CIP (cleaning-in-place) suitable “non-glass” pH sensor based on a Ta2O5-gate EIS structure

'Non-glass' pH-sensitive capacitive EIS (electrolyte-insulator-semiconductor) sensors consisting of a Ta2O5-gate have been investigated in terms of their CIP (cleaning-in-place) suitability. After optimisation of the process parameters, even after 30 CIP cycles, the sensors show a clear pH...

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Veröffentlicht in:Sensors and actuators. B, Chemical Chemical, 2005-11, Vol.111-112 (Complete), p.423-429
Hauptverfasser: Schoning, M J, Brinkmann, D, Rolka, D, Demuth, C, Poghossian, A
Format: Artikel
Sprache:eng
Schlagworte:
Actuators
Calibration
Cleaning
Electrochemical impedance spectroscopy
Optimization
Sensors
Tantalum oxides
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Beschreibung
Zusammenfassung:'Non-glass' pH-sensitive capacitive EIS (electrolyte-insulator-semiconductor) sensors consisting of a Ta2O5-gate have been investigated in terms of their CIP (cleaning-in-place) suitability. After optimisation of the process parameters, even after 30 CIP cycles, the sensors show a clear pH response and nearly linear calibration curve. The video-microscopic and scanning electron microscopy investigations do not show any visible degradation or destruction of the Ta2O5 films.
ISSN:0925-4005
DOI:10.1016/j.snb.2005.03.053