On the use of the matrix pencil method for deep level transient spectroscopy: MP-DLTS

A new approach to capacitance transient analysis, based on the matrix pencil (MP) method, is proposed for deep level transient spectroscopy (DLTS) (MP-DLTS). The MP method offers the least statistical variance of the estimates in the presence of noise. Simulation tests have shown this method to lead...

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Veröffentlicht in:IEEE transactions on instrumentation and measurement 1998-06, Vol.47 (3), p.692-697
Hauptverfasser: Boussaid, F., Olivie, F., Benzohra, M., Martinez, A.
Format: Artikel
Sprache:eng
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Zusammenfassung:A new approach to capacitance transient analysis, based on the matrix pencil (MP) method, is proposed for deep level transient spectroscopy (DLTS) (MP-DLTS). The MP method offers the least statistical variance of the estimates in the presence of noise. Simulation tests have shown this method to lead to a significant improvement in DLTS resolution even for low trap concentrations. Its noise sensitivity and resolution are quantified and compared with five different DLTS analysis techniques. The MP-DLTS method is found to outperform both DLTS spectrum and direct transient analysis techniques. An experimental investigation of the electrically active defects induced by a germanium preamorphization step prior to dopant implantation was undertaken using the MP-DLTS method. Two electron traps were detected in all samples and characterized.
ISSN:0018-9456
1557-9662
DOI:10.1109/19.744327