Study of polymer humidity sensor array on silicon wafer

In this paper, we report the sensing properties of the humidity sensor array made of the polymer material quaternary acrylic resin (RMX) films on silicon substrate, including the sensitivity, hysteresis, response, and recovery times. Also analyzed are the properties of impedance and capacitance vers...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of materials science 2004-05, Vol.39 (9), p.3155-3157
Hauptverfasser: Wang, Jing, Shi, Kaihe, Chen, Lihua, Zhang, Xiaojun
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:In this paper, we report the sensing properties of the humidity sensor array made of the polymer material quaternary acrylic resin (RMX) films on silicon substrate, including the sensitivity, hysteresis, response, and recovery times. Also analyzed are the properties of impedance and capacitance versus relative humidity (RH) at different frequencies.
ISSN:0022-2461
1573-4803
DOI:10.1023/B:JMSC.0000025847.52357.b8