Study of polymer humidity sensor array on silicon wafer
In this paper, we report the sensing properties of the humidity sensor array made of the polymer material quaternary acrylic resin (RMX) films on silicon substrate, including the sensitivity, hysteresis, response, and recovery times. Also analyzed are the properties of impedance and capacitance vers...
Gespeichert in:
Veröffentlicht in: | Journal of materials science 2004-05, Vol.39 (9), p.3155-3157 |
---|---|
Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | In this paper, we report the sensing properties of the humidity sensor array made of the polymer material quaternary acrylic resin (RMX) films on silicon substrate, including the sensitivity, hysteresis, response, and recovery times. Also analyzed are the properties of impedance and capacitance versus relative humidity (RH) at different frequencies. |
---|---|
ISSN: | 0022-2461 1573-4803 |
DOI: | 10.1023/B:JMSC.0000025847.52357.b8 |