Study of 1-3 composite transducer for ultrasonic wirebonding application

Lead zirconate titanate (PZT)/epoxy 1-3 composites consisted of PZT rods embedded in an epoxy matrix were used as the driving elements in an ultrasonic wirebonding transducer for microelectronic packaging. The performance of the 1-3 composite PZT transducer with 0.91 volume fraction of PZT has been...

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Veröffentlicht in:	Ceramics international 2004, Vol.30 (7), p.1141-1146
Hauptverfasser:	Chong, C.P., Li, H.L., Chan, H.L.W., Liu, P.C.K.
Format:	Artikel
Sprache:	eng
Schlagworte:	1-3 Composite Acoustics D. Lead zirconate titanate (PZT) Exact sciences and technology Fundamental areas of phenomenology (including applications) General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics Transducers Transduction acoustical devices for the generation and reproduction of sound Ultrasonic wirebonding transducer
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Beschreibung
Zusammenfassung:	Lead zirconate titanate (PZT)/epoxy 1-3 composites consisted of PZT rods embedded in an epoxy matrix were used as the driving elements in an ultrasonic wirebonding transducer for microelectronic packaging. The performance of the 1-3 composite PZT transducer with 0.91 volume fraction of PZT has been studied. The composite transducer has fewer lateral vibrations and higher damping. It has the potential to be used in new generation high-speed and fine-pitch ultrasonic wirebonding machines.
ISSN:	0272-8842 1873-3956
DOI:	10.1016/j.ceramint.2003.12.013