MIM capacitor modeling: a planar approach

MIM capacitor modeling: a planar approach

On the basis of a planar approach, an equivalent circuit model of MMIC overlay capacitors with feeding lines in generic position has been derived. Closed expressions for the equivalent circuit elements are presented. The validity of the proposed circuit has been successfully tested with experimental...

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Veröffentlicht in:IEEE transactions on microwave theory and techniques 1995-04, Vol.43 (4), p.901-903
Hauptverfasser: Bartolucci, G., Giannini, F., Limiti, E., Marsh, S.P.
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Circuit properties
Circuit testing
Design automation
Dielectric substrates
Electric, optical and optoelectronic circuits
Electronics
Equivalent circuits
Exact sciences and technology
Frequency
Gallium arsenide
Integrated circuit packaging
Metal-insulator structures
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
MIM capacitors
MMICs
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Beschreibung
Zusammenfassung:On the basis of a planar approach, an equivalent circuit model of MMIC overlay capacitors with feeding lines in generic position has been derived. Closed expressions for the equivalent circuit elements are presented. The validity of the proposed circuit has been successfully tested with experimental data. Its simplicity and flexibility makes it attractive for implementation in CAD packages.< >
ISSN:0018-9480
1557-9670
DOI:10.1109/22.375270