Monolithic wavelength-graded VCSEL and resonance-enhanced photodetector arrays for parallel optical interconnects

Monolithic wavelength-graded VCSEL and resonance-enhanced photodetector arrays for parallel optical interconnects

Monolithic arrays of wavelength-graded vertical-cavity surface-emitting lasers (VCSELs) and resonance-enhanced photodetectors (PDs) have been realized with the same epilayer structure using the topography-controlled enhancement and reduction of the metal-organic chemical vapor deposition (MOCVD) gro...

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Veröffentlicht in:IEEE photonics technology letters 1998-05, Vol.10 (5), p.642-644
Hauptverfasser: Luong, S.Q., Ortiz, G.G., Zhou, Y., Jun Lu, Hains, C.P., Cheng, J., Hou, H.Q., Vawter, G.A.
Format: Artikel
Sprache:eng
Schlagworte:
Chemical lasers
Chemical vapor deposition
MOCVD
Optical arrays
Photodetectors
Resonance
Surface emitting lasers
Surface topography
Surface waves
Vertical cavity surface emitting lasers
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Zusammenfassung:Monolithic arrays of wavelength-graded vertical-cavity surface-emitting lasers (VCSELs) and resonance-enhanced photodetectors (PDs) have been realized with the same epilayer structure using the topography-controlled enhancement and reduction of the metal-organic chemical vapor deposition (MOCVD) growth rate on a patterned substrate. The repeatability of this technique was demonstrated by using different VCSEL and resonance-enhanced photodetector (REPD) arrays from the same wafer.
ISSN:1041-1135
1941-0174
DOI:10.1109/68.669222