Rietveld analysis of ferroelectric PbZr0.525Ti0.475O3 thin films

A procedure to obtain all the components of crystal structure by simultaneous Rietveld refinement of the XRD pattern collected is described. The specimens used were PZT thin films prepared by chemical solution deposition and deposited on Si(100) and Si(100) /Pt(200) substrates. The growth condition...

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Veröffentlicht in:	Ceramics international 2004, Vol.30 (7), p.1483-1485
Hauptverfasser:	YOGARAKSA, Teguh, HIKAM, Muhammad, IRZAMAN
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Liquid phase epitaxy deposition from liquid phases (melts, solutions, and surface layers on liquids) Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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