Laser patterning of YBaCuO weak link bridges
A laser ablation process was developed to pattern thin-film superconducting devices with 1- mu m resolution. The process was utilized to fabricate bridge structures in high T/sub c/(>90 K) YBaCuO superconducting thin films sputtered on various substrates. For bridges patterned on thin films with...
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Veröffentlicht in: | IEEE transactions on magnetics 1989-03, Vol.25 (2), p.935-938 |
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Hauptverfasser: | , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | A laser ablation process was developed to pattern thin-film superconducting devices with 1- mu m resolution. The process was utilized to fabricate bridge structures in high T/sub c/(>90 K) YBaCuO superconducting thin films sputtered on various substrates. For bridges patterned on thin films with a high degree of polycrystallinity, the authors observed weak-link Josephson behaviour, from 4.2 K up to T/sub c/. The weak-link behaviour was attributed to grain-boundary superconducting tunneling. The results suggest that direct laser patterning can be a powerful technique for evaluation and optimization of prototype superconducting devices.< > |
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ISSN: | 0018-9464 1941-0069 |
DOI: | 10.1109/20.92441 |