Positronium Annihilation Lifetime Spectroscopy of Porous Low-k Films with Periodic Pore Structures

Positronium Annihilation Lifetime Spectroscopy of Porous Low-k Films with Periodic Pore Structures

Positronium-annihilation lifetime spectroscopy (PALS) with an energy-variable pulsed positron beam is used to measure pore size and pore interconnectivity in porous methyl-silsesquioxane (MSQ) films with periodic pore structures. The results obtained for the films with different k values (1.9-2.3) s...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Materials science forum 2004-01, Vol.445-446, p.334-336
Hauptverfasser: Matsuno, Shin-Ya, Shirataki, Hironobu, Suzuki, Ryoichi, Ohdaira, Toshiyuki
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Positronium-annihilation lifetime spectroscopy (PALS) with an energy-variable pulsed positron beam is used to measure pore size and pore interconnectivity in porous methyl-silsesquioxane (MSQ) films with periodic pore structures. The results obtained for the films with different k values (1.9-2.3) suggest that with increasing porosity the pore structure changes from isolated spheres to connected long cylinders. Comparison between the pore sizes obtained by PALS and TEM is also presented.
ISSN:0255-5476
1662-9752
1662-9752
DOI:10.4028/www.scientific.net/MSF.445-446.334