Electromagnetically actuated mirror arrays for use in 3-D optical switching applications

Electromagnetically actuated mirror arrays for use in 3-D optical switching applications

This paper presents an electromagnetic MEMS mirror technology for use in 3-D optical switching applications. These mirrors may be actuated through large angles at low voltage and low current. Multiple coils on the backs of the mirrors interact with permanent magnetic fields to provide two-axis ortho...

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Veröffentlicht in:Journal of microelectromechanical systems 2004-06, Vol.13 (3), p.526-535
Hauptverfasser: Bernstein, J.J., Taylor, W.P., Brazzle, J.D., Corcoran, C.J., Kirkos, G., Odhner, J.E., Pareek, A., Waelti, M., Zai, M.
Format: Artikel
Sprache:eng
Schlagworte:
Actuation
Arrays
Coils
Displays
Drives
Low currents
Low voltage
Magnetic fields
Magnets
Microelectromechanical systems
Micromechanical devices
Mirrors
Optical arrays
Optical switching
Packages
Packaging
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Beschreibung
Zusammenfassung:This paper presents an electromagnetic MEMS mirror technology for use in 3-D optical switching applications. These mirrors may be actuated through large angles at low voltage and low current. Multiple coils on the backs of the mirrors interact with permanent magnetic fields to provide two-axis orthogonal actuation. A custom package brings the MEMS mirror array and magnets into close proximity. Actuation is linear versus drive current on both axes, and displays negligible charging and drift. These mirrors have achieved greater than 10/spl deg/ mechanical rotation per mA in each axis. The mirror rotation angle is hysteresis free to less than the 0.01/spl deg/ measurement accuracy.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2004.828705