Microdischarge arrays: a new family of photonic devices (revised)

The optical and electrical characteristics of microdischarge devices and arrays fabricated in semiconductors and metal/polymer structures are described. Devices as small as (10 /spl mu/m)/sup 2/ in emitting area (nanoliters in volume) and arrays as large as 30 /spl times/ 30 have been demonstrated and operated at gas pressures up to and exceeding one atmosphere. This new generation of microoptical sources is capable of producing photons from the infrared to the vacuum ultraviolet and beyond and is well suited for integration with microoptoelectronic, fluidic, and mechanical systems.