Internet-based surface metrology algorithm testing system

This paper presents the development of an Internet-based surface metrology algorithm testing system. The system includes peer-reviewed surface analysis tools and a surface texture specimen database for parameter evaluation and algorithm verification. The system runs from a web site at the National I...

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Veröffentlicht in:Wear 2004-12, Vol.257 (12), p.1213-1218
Hauptverfasser: Bui, Son H., Renegar, T. Brian, Vorburger, Theodore V., Raja, Jay, Malburg, Mark C.
Format: Artikel
Sprache:eng
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Zusammenfassung:This paper presents the development of an Internet-based surface metrology algorithm testing system. The system includes peer-reviewed surface analysis tools and a surface texture specimen database for parameter evaluation and algorithm verification. The system runs from a web site at the National Institute of Standards and Technology (NIST), USA. Companies, universities, and instrument manufacturers have Internet access to standard data sets and analysis tools located on a NIST server. The system serves to validate the accuracy of algorithms as well as the calculation of surface parameters in industry.
ISSN:0043-1648
1873-2577
DOI:10.1016/j.wear.2004.05.023