On the Nonlinear Dynamics of Tether Suspensions for MEMS

On the Nonlinear Dynamics of Tether Suspensions for MEMS

Many MEM devices feature tether suspensions and it is known that the tethers induce a stiffening behavior. In this paper, we develop a model for a tether and, from it, establish several useful expressions for the nonlinear restoring forces and torques it provides. For a specific gyroscope, the expre...

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Veröffentlicht in:Journal of vibration and acoustics 2004-07, Vol.126 (3), p.326-331
Hauptverfasser: Davis, Wyatt O, O’Reilly, Oliver M, Pisano, Albert P
Format: Artikel
Sprache:eng
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Zusammenfassung:Many MEM devices feature tether suspensions and it is known that the tethers induce a stiffening behavior. In this paper, we develop a model for a tether and, from it, establish several useful expressions for the nonlinear restoring forces and torques it provides. For a specific gyroscope, the expressions we find are compared to experimental results.
ISSN:1048-9002
1528-8927
DOI:10.1115/1.1760558