Interrelationship between atomic species, bias voltage, texture and microstructure of nano-scale multilayers

A matrix of binary and ternary nitrides containing lighter elements (Al, Ti, V and Cr) with atomic mass 89 has been formulated. These have been grown as nano-scale multilayer coatings (bi-layer thickness approx. 3.0 nm) on stainless steel substrates using an industrial size multiple-target ABS coater. When lighter elements are incorporated into the multilayer at a lower bias voltage ( U B =−75 V) pronounced {111} or {110}, textures develop which are determined by the dominating species present. A {111} or {110} texture develops when TiAlN or VN and or CrN dominates the matrix, respectively. In contrast when a heavier element is incorporated a {100} texture is observed. Additionally, there is a strong indication that in the case when heavy elements (>89) are involved in the growth process, which evolves by continuous re-nucleation. Conversely, when only light elements (