Analyses of thin films and surfaces by cold neutron depth profiling
Neutron depth profiling (NDP) has been employed to examine manufacturing processes and starting materials for several high-technology applications. NDP combines nuclear and atomic physics processes to determine the concentration profile of several light elements in the near surface region (∼1–8μm) o...
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| Veröffentlicht in: | Applied surface science 2004-11, Vol.238 (1-4), p.108-112 |
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| creator | Lamaze, G.P. Chen-Mayer, H.H. Soni, K.K. |
| description | Neutron depth profiling (NDP) has been employed to examine manufacturing processes and starting materials for several high-technology applications. NDP combines nuclear and atomic physics processes to determine the concentration profile of several light elements in the near surface region (∼1–8μm) of smooth surfaces. The method is both quantitative and non-destructive. Analyses are performed at the Center for Neutron Research at NIST on samples prepared at Corning Incorporated. Two types of samples have been analyzed: (1) Boron profiles are measured in glasses to determine B loss due to its volatilization during manufacturing. Surface depletion of B is a key characteristic of borosilicate materials for both chemical vapor deposition and conventional melting processes. (2) For lithium niobate, a quantitative measure of Li concentration can differentiate congruent and stoichiometric compositions and any surface depletion in commercial wafers. |
| doi_str_mv | 10.1016/j.apsusc.2004.05.192 |
| format | Article |
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(2) For lithium niobate, a quantitative measure of Li concentration can differentiate congruent and stoichiometric compositions and any surface depletion in commercial wafers.</description><subject>Boron</subject><subject>Borosilicate glass</subject><subject>Chemical composition analysis, chemical depth and dopant profiling</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Depth profiling</subject><subject>Exact sciences and technology</subject><subject>Lithium niobate</subject><subject>Materials science</subject><subject>Materials testing</subject><subject>Neutrons</subject><subject>Physics</subject><issn>0169-4332</issn><issn>1873-5584</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2004</creationdate><recordtype>article</recordtype><recordid>eNqNkE1r3DAQhkVoods0_6AHXZKbHX1Y9upSCEvSBgK5JGchj0eJFq-81diB_ffVsoHeQk5zeJ-Zd3gY-ylFLYVsr7e139NCUCshmlqYWlp1xlZy3enKmHXzha0KZqtGa_WNfSfaCiFVSVdsc5P8eCAkPgU-v8bEQxx3xH0aOC05eChRf-AwjQNPuMx5SnzA_fzK93kqbEwvP9jX4EfCi_d5zp7vbp82f6qHx9_3m5uHCrRt50qBsFr7vjMoDViUAUynjJKq69foW9-3GoPtjAdltW-GdvAaRDv0AiQEo8_Z1eluaf67IM1uFwlwHH3CaSGn1qprTNd9ApRSWNEWsDmBkCeijMHtc9z5fHBSuKNat3Unte6o1gnjitqydvl-3xP4MWSfINL_3bZprLLHh3-dOCxW3iJmRxAxAQ4xI8xumOLHRf8A-qWRLg</recordid><startdate>20041115</startdate><enddate>20041115</enddate><creator>Lamaze, G.P.</creator><creator>Chen-Mayer, H.H.</creator><creator>Soni, K.K.</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>7QQ</scope><scope>7SR</scope><scope>7U5</scope><scope>JG9</scope></search><sort><creationdate>20041115</creationdate><title>Analyses of thin films and surfaces by cold neutron depth profiling</title><author>Lamaze, G.P. ; Chen-Mayer, H.H. ; Soni, K.K.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c396t-2c0933ab75e15c9e1fc57252127b8ea6ab63ef975ac293a4d6da3c06db0c1cf53</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2004</creationdate><topic>Boron</topic><topic>Borosilicate glass</topic><topic>Chemical composition analysis, chemical depth and dopant profiling</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Depth profiling</topic><topic>Exact sciences and technology</topic><topic>Lithium niobate</topic><topic>Materials science</topic><topic>Materials testing</topic><topic>Neutrons</topic><topic>Physics</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Lamaze, G.P.</creatorcontrib><creatorcontrib>Chen-Mayer, H.H.</creatorcontrib><creatorcontrib>Soni, K.K.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Ceramic Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Materials Research Database</collection><jtitle>Applied surface science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Lamaze, G.P.</au><au>Chen-Mayer, H.H.</au><au>Soni, K.K.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Analyses of thin films and surfaces by cold neutron depth profiling</atitle><jtitle>Applied surface science</jtitle><date>2004-11-15</date><risdate>2004</risdate><volume>238</volume><issue>1-4</issue><spage>108</spage><epage>112</epage><pages>108-112</pages><issn>0169-4332</issn><eissn>1873-5584</eissn><abstract>Neutron depth profiling (NDP) has been employed to examine manufacturing processes and starting materials for several high-technology applications. 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| identifier | ISSN: 0169-4332 |
| ispartof | Applied surface science, 2004-11, Vol.238 (1-4), p.108-112 |
| issn | 0169-4332 1873-5584 |
| language | eng |
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| source | Elsevier ScienceDirect Journals Complete |
| subjects | Boron Borosilicate glass Chemical composition analysis, chemical depth and dopant profiling Cross-disciplinary physics: materials science rheology Depth profiling Exact sciences and technology Lithium niobate Materials science Materials testing Neutrons Physics |
| title | Analyses of thin films and surfaces by cold neutron depth profiling |
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