Analyses of thin films and surfaces by cold neutron depth profiling
Neutron depth profiling (NDP) has been employed to examine manufacturing processes and starting materials for several high-technology applications. NDP combines nuclear and atomic physics processes to determine the concentration profile of several light elements in the near surface region (∼1–8μm) o...
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Veröffentlicht in: | Applied surface science 2004-11, Vol.238 (1-4), p.108-112 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Neutron depth profiling (NDP) has been employed to examine manufacturing processes and starting materials for several high-technology applications. NDP combines nuclear and atomic physics processes to determine the concentration profile of several light elements in the near surface region (∼1–8μm) of smooth surfaces. The method is both quantitative and non-destructive. Analyses are performed at the Center for Neutron Research at NIST on samples prepared at Corning Incorporated. Two types of samples have been analyzed: (1) Boron profiles are measured in glasses to determine B loss due to its volatilization during manufacturing. Surface depletion of B is a key characteristic of borosilicate materials for both chemical vapor deposition and conventional melting processes. (2) For lithium niobate, a quantitative measure of Li concentration can differentiate congruent and stoichiometric compositions and any surface depletion in commercial wafers. |
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ISSN: | 0169-4332 1873-5584 |
DOI: | 10.1016/j.apsusc.2004.05.192 |