Design of a superconducting MEM shunt switch for RF applications

We have designed, simulated and optimized a capacitively shunted RF MicroElectroMechanical (MEM) superconducting switch. The switch consists of a High Temperature Superconducting (HTS) YBa/sub 2/Cu/sub 3/O/sub 7/ coplanar waveguide (CPW) structure with a gold membrane bridge suspended above the cent...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 2003-06, Vol.13 (2), p.696-699
Hauptverfasser:	Hijazi, Y.S., Vlasov, Y.A., Larkins, G.L.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Biomembranes Bridge circuits Circuit properties Conductors Coplanar waveguides Design optimization Electric, optical and optoelectronic circuits Electrical engineering. Electrical power engineering Electromagnets Electronics Exact sciences and technology Gold High temperature superconductors Integrated optics. Optical fibers and wave guides Land surface temperature Micro- and nanoelectromechanical devices (mems/nems) Optical and optoelectronic circuits Radio frequency Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Superconducting devices Switches Various equipment and components
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