Temporal coherence envelope function of field emission in electron microscopy
•The temporal coherence envelope function for an arbitrary electron energy distribution is derived.•This work generalizes the envelope function derived by Hanßen and Trepte assuming a Gaussian energy distribution.•The envelope function for a field emission energy distribution employed in state-of-th...
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Veröffentlicht in: | Ultramicroscopy 2023-10, Vol.252, p.113751-113751, Article 113751 |
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Sprache: | eng |
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Zusammenfassung: | •The temporal coherence envelope function for an arbitrary electron energy distribution is derived.•This work generalizes the envelope function derived by Hanßen and Trepte assuming a Gaussian energy distribution.•The envelope function for a field emission energy distribution employed in state-of-the-art instruments is obtained explicitly.•The field emission envelope function causes a focus offset and weak effect on resolution in Fourier optics simulations for low energy electron microscopy.
Imaging in electron microscopy is adversely affected by partial electron spatial and temporal coherence. Temporal coherence has been treated theoretically in the past using the method pioneered fifty years ago by Hanßen and Trepte, who assumed a Gaussian energy distribution. However, state-of-the-art instruments employ field emission (FE) sources that emit electrons with a non-Gaussian energy distribution. We have updated the treatment of temporal coherence to describe the effects of an arbitrary energy distribution on image formation. The updated approach is implemented in Fourier optics simulations to explore the effect of FE on image formation in conventional, non-aberration-corrected (NAC) and aberration-corrected (AC) low energy electron microscopy. It is found that the resolution that can be achieved for the FE distribution is only slightly degraded compared to a Gaussian distribution with the same energy spread. FE also produces a focus offset. These two effects are weaker for AC than for NAC microscopy. These and other insights may be relevant to the selection of the aperture size that optimizes resolution and to analyses that make use of focal image series. The approach developed here is also applicable to transmission electron microscopy. |
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ISSN: | 0304-3991 1879-2723 |
DOI: | 10.1016/j.ultramic.2023.113751 |