Fabrication and characterization of integrated optical waveguides in sulfide chalcogenide glasses
This paper reports on the fabrication process of As-S-(Se)-based chalcogenide glass optical waveguides using three techniques: photolithography, laser beam writing, and ion implantation. The fabrication method of the bulk sulfide glasses and the processing of integrated devices are described and ass...
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| Veröffentlicht in: | Journal of lightwave technology 1999-07, Vol.17 (7), p.1184-1191 |
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| container_end_page | 1191 |
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| container_issue | 7 |
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| container_title | Journal of lightwave technology |
| container_volume | 17 |
| creator | Viens, J.-F. Meneghini, C. Villeneuve, A. Galstian, T.V. Knystautas, E.J. Duguay, M.A. Richardson, K.A. Cardinal, T. |
| description | This paper reports on the fabrication process of As-S-(Se)-based chalcogenide glass optical waveguides using three techniques: photolithography, laser beam writing, and ion implantation. The fabrication method of the bulk sulfide glasses and the processing of integrated devices are described and assessed in light of the propagation characteristics and optical losses in each case. |
| doi_str_mv | 10.1109/50.774252 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_proquest_miscellaneous_28251264</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>774252</ieee_id><sourcerecordid>1022900054</sourcerecordid><originalsourceid>FETCH-LOGICAL-c468t-8275b61991138c8845dd06b2f4aecec387917f822b3633d3a709e34e839a2fa23</originalsourceid><addsrcrecordid>eNqFkUtP3DAQgC3USmwpB66cckCUHrLYYzu2jxXiJa3USzlHs85kcRWSxc4W0V9fR1mVG5zm9c13mGHsRPClENxdar40RoGGA7YQWtsSQMhPbMGNlKU1oA7Zl5R-cy6UsmbB8AbXMXgcw9AX2DeFf8SIfqQY_s7NoS1CP9Im4khNMWzHTHfFC_6hzS40lPK0SLuuzfm03PlhQ_1UbDpMidJX9rnFLtHxPh6xh5vrX1d35ern7f3Vj1XpVWXH0oLR60o4J4S03lqlm4ZXa2gVkicvrXHCtBZgLSspG4mGO5KKrHQILYI8Yt9m7zYOzztKY_0Ukqeuw56GXapddstKKZHJ83dJsKAFVOpjsHLagpuMF--CggM4zrmenN9n1MchpUhtvY3hCeNrhurphbXm9fzCzJ7ttZjy0duIvQ_pbcGaSoDJ2OmMBSL6P907_gHi8qJz</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1022900054</pqid></control><display><type>article</type><title>Fabrication and characterization of integrated optical waveguides in sulfide chalcogenide glasses</title><source>IEEE Electronic Library (IEL)</source><creator>Viens, J.-F. ; Meneghini, C. ; Villeneuve, A. ; Galstian, T.V. ; Knystautas, E.J. ; Duguay, M.A. ; Richardson, K.A. ; Cardinal, T.</creator><creatorcontrib>Viens, J.-F. ; Meneghini, C. ; Villeneuve, A. ; Galstian, T.V. ; Knystautas, E.J. ; Duguay, M.A. ; Richardson, K.A. ; Cardinal, T.</creatorcontrib><description>This paper reports on the fabrication process of As-S-(Se)-based chalcogenide glass optical waveguides using three techniques: photolithography, laser beam writing, and ion implantation. The fabrication method of the bulk sulfide glasses and the processing of integrated devices are described and assessed in light of the propagation characteristics and optical losses in each case.</description><identifier>ISSN: 0733-8724</identifier><identifier>EISSN: 1558-2213</identifier><identifier>DOI: 10.1109/50.774252</identifier><identifier>CODEN: JLTEDG</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Applied sciences ; Chalcogenides ; Circuit properties ; Devices ; Electric, optical and optoelectronic circuits ; Electronics ; Exact sciences and technology ; Glass ; Integrated optics ; Integrated optics. Optical fibers and wave guides ; Ion beams ; Ion implantation ; Laser beams ; Lithography ; Optical and optoelectronic circuits ; Optical device fabrication ; Optical waveguides ; Particle beam optics ; Photolithography ; Sulfides ; Waveguide lasers ; Writing</subject><ispartof>Journal of lightwave technology, 1999-07, Vol.17 (7), p.1184-1191</ispartof><rights>1999 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c468t-8275b61991138c8845dd06b2f4aecec387917f822b3633d3a709e34e839a2fa23</citedby><cites>FETCH-LOGICAL-c468t-8275b61991138c8845dd06b2f4aecec387917f822b3633d3a709e34e839a2fa23</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/774252$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/774252$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=1876127$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Viens, J.-F.</creatorcontrib><creatorcontrib>Meneghini, C.</creatorcontrib><creatorcontrib>Villeneuve, A.</creatorcontrib><creatorcontrib>Galstian, T.V.</creatorcontrib><creatorcontrib>Knystautas, E.J.</creatorcontrib><creatorcontrib>Duguay, M.A.</creatorcontrib><creatorcontrib>Richardson, K.A.</creatorcontrib><creatorcontrib>Cardinal, T.</creatorcontrib><title>Fabrication and characterization of integrated optical waveguides in sulfide chalcogenide glasses</title><title>Journal of lightwave technology</title><addtitle>JLT</addtitle><description>This paper reports on the fabrication process of As-S-(Se)-based chalcogenide glass optical waveguides using three techniques: photolithography, laser beam writing, and ion implantation. The fabrication method of the bulk sulfide glasses and the processing of integrated devices are described and assessed in light of the propagation characteristics and optical losses in each case.</description><subject>Applied sciences</subject><subject>Chalcogenides</subject><subject>Circuit properties</subject><subject>Devices</subject><subject>Electric, optical and optoelectronic circuits</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Glass</subject><subject>Integrated optics</subject><subject>Integrated optics. Optical fibers and wave guides</subject><subject>Ion beams</subject><subject>Ion implantation</subject><subject>Laser beams</subject><subject>Lithography</subject><subject>Optical and optoelectronic circuits</subject><subject>Optical device fabrication</subject><subject>Optical waveguides</subject><subject>Particle beam optics</subject><subject>Photolithography</subject><subject>Sulfides</subject><subject>Waveguide lasers</subject><subject>Writing</subject><issn>0733-8724</issn><issn>1558-2213</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1999</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNqFkUtP3DAQgC3USmwpB66cckCUHrLYYzu2jxXiJa3USzlHs85kcRWSxc4W0V9fR1mVG5zm9c13mGHsRPClENxdar40RoGGA7YQWtsSQMhPbMGNlKU1oA7Zl5R-cy6UsmbB8AbXMXgcw9AX2DeFf8SIfqQY_s7NoS1CP9Im4khNMWzHTHfFC_6hzS40lPK0SLuuzfm03PlhQ_1UbDpMidJX9rnFLtHxPh6xh5vrX1d35ern7f3Vj1XpVWXH0oLR60o4J4S03lqlm4ZXa2gVkicvrXHCtBZgLSspG4mGO5KKrHQILYI8Yt9m7zYOzztKY_0Ukqeuw56GXapddstKKZHJ83dJsKAFVOpjsHLagpuMF--CggM4zrmenN9n1MchpUhtvY3hCeNrhurphbXm9fzCzJ7ttZjy0duIvQ_pbcGaSoDJ2OmMBSL6P907_gHi8qJz</recordid><startdate>19990701</startdate><enddate>19990701</enddate><creator>Viens, J.-F.</creator><creator>Meneghini, C.</creator><creator>Villeneuve, A.</creator><creator>Galstian, T.V.</creator><creator>Knystautas, E.J.</creator><creator>Duguay, M.A.</creator><creator>Richardson, K.A.</creator><creator>Cardinal, T.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>19990701</creationdate><title>Fabrication and characterization of integrated optical waveguides in sulfide chalcogenide glasses</title><author>Viens, J.-F. ; Meneghini, C. ; Villeneuve, A. ; Galstian, T.V. ; Knystautas, E.J. ; Duguay, M.A. ; Richardson, K.A. ; Cardinal, T.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c468t-8275b61991138c8845dd06b2f4aecec387917f822b3633d3a709e34e839a2fa23</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1999</creationdate><topic>Applied sciences</topic><topic>Chalcogenides</topic><topic>Circuit properties</topic><topic>Devices</topic><topic>Electric, optical and optoelectronic circuits</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>Glass</topic><topic>Integrated optics</topic><topic>Integrated optics. Optical fibers and wave guides</topic><topic>Ion beams</topic><topic>Ion implantation</topic><topic>Laser beams</topic><topic>Lithography</topic><topic>Optical and optoelectronic circuits</topic><topic>Optical device fabrication</topic><topic>Optical waveguides</topic><topic>Particle beam optics</topic><topic>Photolithography</topic><topic>Sulfides</topic><topic>Waveguide lasers</topic><topic>Writing</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Viens, J.-F.</creatorcontrib><creatorcontrib>Meneghini, C.</creatorcontrib><creatorcontrib>Villeneuve, A.</creatorcontrib><creatorcontrib>Galstian, T.V.</creatorcontrib><creatorcontrib>Knystautas, E.J.</creatorcontrib><creatorcontrib>Duguay, M.A.</creatorcontrib><creatorcontrib>Richardson, K.A.</creatorcontrib><creatorcontrib>Cardinal, T.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of lightwave technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Viens, J.-F.</au><au>Meneghini, C.</au><au>Villeneuve, A.</au><au>Galstian, T.V.</au><au>Knystautas, E.J.</au><au>Duguay, M.A.</au><au>Richardson, K.A.</au><au>Cardinal, T.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Fabrication and characterization of integrated optical waveguides in sulfide chalcogenide glasses</atitle><jtitle>Journal of lightwave technology</jtitle><stitle>JLT</stitle><date>1999-07-01</date><risdate>1999</risdate><volume>17</volume><issue>7</issue><spage>1184</spage><epage>1191</epage><pages>1184-1191</pages><issn>0733-8724</issn><eissn>1558-2213</eissn><coden>JLTEDG</coden><abstract>This paper reports on the fabrication process of As-S-(Se)-based chalcogenide glass optical waveguides using three techniques: photolithography, laser beam writing, and ion implantation. The fabrication method of the bulk sulfide glasses and the processing of integrated devices are described and assessed in light of the propagation characteristics and optical losses in each case.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/50.774252</doi><tpages>8</tpages></addata></record> |
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| ispartof | Journal of lightwave technology, 1999-07, Vol.17 (7), p.1184-1191 |
| issn | 0733-8724 1558-2213 |
| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Applied sciences Chalcogenides Circuit properties Devices Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Glass Integrated optics Integrated optics. Optical fibers and wave guides Ion beams Ion implantation Laser beams Lithography Optical and optoelectronic circuits Optical device fabrication Optical waveguides Particle beam optics Photolithography Sulfides Waveguide lasers Writing |
| title | Fabrication and characterization of integrated optical waveguides in sulfide chalcogenide glasses |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-08T02%3A57%3A50IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Fabrication%20and%20characterization%20of%20integrated%20optical%20waveguides%20in%20sulfide%20chalcogenide%20glasses&rft.jtitle=Journal%20of%20lightwave%20technology&rft.au=Viens,%20J.-F.&rft.date=1999-07-01&rft.volume=17&rft.issue=7&rft.spage=1184&rft.epage=1191&rft.pages=1184-1191&rft.issn=0733-8724&rft.eissn=1558-2213&rft.coden=JLTEDG&rft_id=info:doi/10.1109/50.774252&rft_dat=%3Cproquest_RIE%3E1022900054%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1022900054&rft_id=info:pmid/&rft_ieee_id=774252&rfr_iscdi=true |