Fabrication and characterization of integrated optical waveguides in sulfide chalcogenide glasses

This paper reports on the fabrication process of As-S-(Se)-based chalcogenide glass optical waveguides using three techniques: photolithography, laser beam writing, and ion implantation. The fabrication method of the bulk sulfide glasses and the processing of integrated devices are described and ass...

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Veröffentlicht in:	Journal of lightwave technology 1999-07, Vol.17 (7), p.1184-1191
Hauptverfasser:	Viens, J.-F., Meneghini, C., Villeneuve, A., Galstian, T.V., Knystautas, E.J., Duguay, M.A., Richardson, K.A., Cardinal, T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Chalcogenides Circuit properties Devices Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Glass Integrated optics Integrated optics. Optical fibers and wave guides Ion beams Ion implantation Laser beams Lithography Optical and optoelectronic circuits Optical device fabrication Optical waveguides Particle beam optics Photolithography Sulfides Waveguide lasers Writing
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Beschreibung
Zusammenfassung:	This paper reports on the fabrication process of As-S-(Se)-based chalcogenide glass optical waveguides using three techniques: photolithography, laser beam writing, and ion implantation. The fabrication method of the bulk sulfide glasses and the processing of integrated devices are described and assessed in light of the propagation characteristics and optical losses in each case.
ISSN:	0733-8724 1558-2213
DOI:	10.1109/50.774252