Electrical resistance of ultra thin Ag-, Cu- and Mn-films on Ge-substrates
The resistivity ρ of very thin Ag- and Cu-films prepared in a very high vacuum on Ge-substrates could be as low as 4 μΩm for 1-nm thick films. ρ was found to be approximately proportional to t − n , with 2< n
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Veröffentlicht in: | Thin solid films 2004-06, Vol.458 (1), p.322-324 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | The resistivity
ρ of very thin Ag- and Cu-films prepared in a very high vacuum on Ge-substrates could be as low as 4 μΩm for 1-nm thick films.
ρ was found to be approximately proportional to
t
−
n
, with 2<
n |
---|---|
ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/j.tsf.2003.12.060 |