CMOS magnetic-field sensor system
A magnetic-field sensor system integrated in CMOS technology with additional processing steps necessary for sensor fabrication is presented. The system contains a magnetoresistive permalloy microbridge acting as a sensor, temperature compensation circuitry, programmable readout electronics, referenc...
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| Veröffentlicht in: | IEEE journal of solid-state circuits 1994-08, Vol.29 (8), p.1002-1005 |
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| container_end_page | 1005 |
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| container_issue | 8 |
| container_start_page | 1002 |
| container_title | IEEE journal of solid-state circuits |
| container_volume | 29 |
| creator | Sprotte, A. Buckhorst, K. Brockherde, W. Hosticka, B.J. Bosch, D. |
| description | A magnetic-field sensor system integrated in CMOS technology with additional processing steps necessary for sensor fabrication is presented. The system contains a magnetoresistive permalloy microbridge acting as a sensor, temperature compensation circuitry, programmable readout electronics, reference voltage bias, and clock generation. It features maximum magnetic flux sensitivity of 70 mV//spl mu/T (corresponds to the magnetic-field sensitivity of 88.2 mV/(A/m) at /spl mu//sub r/=1) and its temperature gain is below 260 ppm//spl deg/C in the range between -50/spl deg/C and +100/spl deg/C.< > |
| doi_str_mv | 10.1109/4.297713 |
| format | Article |
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The system contains a magnetoresistive permalloy microbridge acting as a sensor, temperature compensation circuitry, programmable readout electronics, reference voltage bias, and clock generation. 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| ispartof | IEEE journal of solid-state circuits, 1994-08, Vol.29 (8), p.1002-1005 |
| issn | 0018-9200 1558-173X |
| language | eng |
| recordid | cdi_proquest_miscellaneous_28213930 |
| source | IEEE Electronic Library (IEL) |
| subjects | CMOS process CMOS technology Fabrication Integrated circuit technology Magnetic circuits Magnetic flux Magnetic sensors Magnetoresistance Sensor systems Temperature sensors |
| title | CMOS magnetic-field sensor system |
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