Micromachining Yields Compact FT Spectrometers

Fourier transform spectroscopy is poised to take the next step forward. Thanks to silicon micromachining techniques, high-resolution spectrometers will soon move out of the lab and into commercial applications. Instruments based on microelectromechanical systems (MEMS) technology, as illustrated by...

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Veröffentlicht in:Photonics spectra (Pittsfield, Mass. 1982) Mass. 1982), 2004-08, Vol.38 (8), p.26
1. Verfasser: Manzuardo, Omar
Format: Magazinearticle
Sprache:eng
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Zusammenfassung:Fourier transform spectroscopy is poised to take the next step forward. Thanks to silicon micromachining techniques, high-resolution spectrometers will soon move out of the lab and into commercial applications. Instruments based on microelectromechanical systems (MEMS) technology, as illustrated by a lamellar grating interferometer developed at the University of Neuchatel's Institute of Microtechnology in Switzerland, will be produced in large quantities and at low cost.
ISSN:0731-1230