Fabrication of a high frequency piezoelectric microvalve

Fabrication of a high frequency piezoelectric microvalve

The fabrication of an active MEMS microvalve driven by integrated bulk single crystal piezoelectric actuators is reported. The valve has a nine-layer structure composed of glass, silicon, and silicon on insulator (SOI) layers assembled by wafer-level fusion bonding and anodic bonding, as well as die...

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Veröffentlicht in:Sensors and actuators. A. Physical. 2004-03, Vol.111 (1), p.51-56
Hauptverfasser: Li, H.Q, Roberts, D.C, Steyn, J.L, Turner, K.T, Yaglioglu, O, Hagood, N.W, Spearing, S.M, Schmidt, M.A
Format: Artikel
Sprache:eng
Schlagworte:
Hydraulic amplification
MEMS
Microvalve
Multilayer
Piezoelectric
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Zusammenfassung:The fabrication of an active MEMS microvalve driven by integrated bulk single crystal piezoelectric actuators is reported. The valve has a nine-layer structure composed of glass, silicon, and silicon on insulator (SOI) layers assembled by wafer-level fusion bonding and anodic bonding, as well as die-level anodic bonding and eutectic bonding. Valve head strokes as large as 20 μm were realized through hydraulic amplification of the small stroke of the piezoelectric actuator. A flow rate of 0.21 ml/s was obtained at 1 kHz. The fabrication, bonding and assembly process, as well as some test results are described.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2003.10.013