Determination of vapour pressure and standard enthalpies of sublimation and vapourisation of N, N′-ethylenebis(2,4-pentanedion-iminoato)nickel(II) by a TG-based transpiration method

In order to identify a volatile metallo-organic precursor for the deposition of nickel films for CVD applications, equilibrium vapour pressure ( p e) measurements were carried out on a N, N′-ethylenebis(2,4-pentanedion-iminoato)nickel(II) (Ni[(acac) 2en]) by employing a TG-based transpiration method...

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Veröffentlicht in:	Materials letters 2004-07, Vol.58 (17), p.2256-2260
Hauptverfasser:	Antony Premkumar, P, Pankajavalli, R, Sreedharan, O.M, Raghunathan, V.S, Nagaraja, K.S, Mallika, C
Format:	Artikel
Sprache:	eng
Schlagworte:	Characterisation methods Chemical vapour deposition Ni complexes Sublimation enthalpy TG-based transpiration Thermal properties
Online-Zugang:	Volltext
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