Determination of vapour pressure and standard enthalpies of sublimation and vapourisation of N, N′-ethylenebis(2,4-pentanedion-iminoato)nickel(II) by a TG-based transpiration method

In order to identify a volatile metallo-organic precursor for the deposition of nickel films for CVD applications, equilibrium vapour pressure ( p e) measurements were carried out on a N, N′-ethylenebis(2,4-pentanedion-iminoato)nickel(II) (Ni[(acac) 2en]) by employing a TG-based transpiration method...

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Veröffentlicht in:Materials letters 2004-07, Vol.58 (17), p.2256-2260
Hauptverfasser: Antony Premkumar, P, Pankajavalli, R, Sreedharan, O.M, Raghunathan, V.S, Nagaraja, K.S, Mallika, C
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Sprache:eng
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Zusammenfassung:In order to identify a volatile metallo-organic precursor for the deposition of nickel films for CVD applications, equilibrium vapour pressure ( p e) measurements were carried out on a N, N′-ethylenebis(2,4-pentanedion-iminoato)nickel(II) (Ni[(acac) 2en]) by employing a TG-based transpiration method over the range 406 to 495 K leading to values of 118.0±4.1 and 83.3±3.8 kJ mol −1 for the standard enthalpies of sublimation and vapourisation, respectively of Ni[(acac) 2en]. From the plot of log p e against 1/ T, the melting point was derived to be 463 K, which is in reasonable agreement with 469±3 K reported in the literature and was also observed in DTA and melting point studies.
ISSN:0167-577X
1873-4979
DOI:10.1016/j.matlet.2004.02.005