Determination of vapour pressure and standard enthalpies of sublimation and vapourisation of N, N′-ethylenebis(2,4-pentanedion-iminoato)nickel(II) by a TG-based transpiration method
In order to identify a volatile metallo-organic precursor for the deposition of nickel films for CVD applications, equilibrium vapour pressure ( p e) measurements were carried out on a N, N′-ethylenebis(2,4-pentanedion-iminoato)nickel(II) (Ni[(acac) 2en]) by employing a TG-based transpiration method...
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Veröffentlicht in: | Materials letters 2004-07, Vol.58 (17), p.2256-2260 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | In order to identify a volatile metallo-organic precursor for the deposition of nickel films for CVD applications, equilibrium vapour pressure (
p
e) measurements were carried out on a
N,
N′-ethylenebis(2,4-pentanedion-iminoato)nickel(II) (Ni[(acac)
2en]) by employing a TG-based transpiration method over the range 406 to 495 K leading to values of 118.0±4.1 and 83.3±3.8 kJ mol
−1 for the standard enthalpies of sublimation and vapourisation, respectively of Ni[(acac)
2en]. From the plot of log
p
e against 1/
T, the melting point was derived to be 463 K, which is in reasonable agreement with 469±3 K reported in the literature and was also observed in DTA and melting point studies. |
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ISSN: | 0167-577X 1873-4979 |
DOI: | 10.1016/j.matlet.2004.02.005 |