Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics

Lab-on-a-chip (LOC) forms the basis of new-generation portable analytical systems. LOC allows the manipulation of ultralow flows of liquid reagents and multistep reactions on a microfluidic chip, which requires a robust and precise instrument to control the flow of liquids on a chip. However, commer...

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Veröffentlicht in:	Lab on a chip 2023-06, Vol.23 (12), p.2789-2797
Hauptverfasser:	Ryzhkov, Vitaly V, Echeistov, Vladimir V, Zverev, Aleksandr V, Baklykov, Dmitry A, Konstantinova, Tatyana, Lotkov, Evgeny S, Ryazantcev, Pavel G, Sh. Alibekov, Ruslan, Kuguk, Aleksey K, Aleksandrov, Andrey R, Krasko, Elisey S, Barbasheva, Anastasiya A, Ryzhikov, Ilya A, Rodionov, Ilya A
Format:	Artikel
Sprache:	eng
Schlagworte:	Control equipment Flowmeters Liquids Membranes Microchannels Microfluidics Parameter sensitivity Reagents Sensors Silicon Thin films Time response Topology Tubes
Online-Zugang:	Volltext
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