120-GHz long-wavelength low-capacitance photodetector with an air-bridged coplanar metal waveguide

120-GHz long-wavelength low-capacitance photodetector with an air-bridged coplanar metal waveguide

We demonstrate a long-wavelength detector structure using an undercut mesa and an air-bridged coplanar metal waveguide to significantly reduce both the diode RC constant and the parasitic capacitance. Record electrical bandwidths of 120 GHz are demonstrated for long-wavelength photodetectors.

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Veröffentlicht in:IEEE photonics technology letters 1995-12, Vol.7 (12), p.1477-1479
Hauptverfasser: I-Hsing Tan, Chi-Kuang Sun, Giboney, K.S., Bowers, J.E., Hu, E.L., Miller, B.I., Capik, R.J.
Format: Artikel
Sprache:eng
Schlagworte:
Bandwidth
Coplanar waveguides
Detectors
Indium gallium arsenide
Indium phosphide
Optical waveguides
P-i-n diodes
Parasitic capacitance
Photodetectors
Substrates
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Beschreibung
Zusammenfassung:We demonstrate a long-wavelength detector structure using an undercut mesa and an air-bridged coplanar metal waveguide to significantly reduce both the diode RC constant and the parasitic capacitance. Record electrical bandwidths of 120 GHz are demonstrated for long-wavelength photodetectors.
ISSN:1041-1135
1941-0174
DOI:10.1109/68.477288