Flash Lamp Supported Deposition of 3C-SiC (FLASiC) – a Promising Technique to Produce High Quality Cubic SiC Layers
This paper summarises latest advancements regarding FLASiC (Flash lamp supported deposition of 3C-SiC) as a new approach to produce high quality SiC-Si heteroepitaxial material. This concerns description of the process and equipment, microstructural results and modelling aspects. In this manner a ne...
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| Veröffentlicht in: | Materials science forum 2004-01, Vol.457-460, p.175-180 |
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| creator | Smith, M. Pezoldt, Joerg Anwand, W. Friedberger, A. Panknin, D. Stoemenos, J. Skorupa, Wolfgang McMahon, R.A. Monteil, Yves Mestres, Narcis Godignon, Philippe Camassel, Jean Polychroniadis, Efstathios K. Leycuras, André Ferro, Gabriel Turover, Daniel Voelskow, M. Rushworth, S. |
| description | This paper summarises latest advancements regarding FLASiC (Flash lamp supported deposition of 3C-SiC) as a new approach to produce high quality SiC-Si heteroepitaxial material. This concerns description of the process and equipment, microstructural results and modelling aspects. In this manner a new era of nanoscale liquid phase epitaxy could be born. |
| doi_str_mv | 10.4028/www.scientific.net/MSF.457-460.175 |
| format | Article |
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| title | Flash Lamp Supported Deposition of 3C-SiC (FLASiC) – a Promising Technique to Produce High Quality Cubic SiC Layers |
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