Flash Lamp Supported Deposition of 3C-SiC (FLASiC) – a Promising Technique to Produce High Quality Cubic SiC Layers

This paper summarises latest advancements regarding FLASiC (Flash lamp supported deposition of 3C-SiC) as a new approach to produce high quality SiC-Si heteroepitaxial material. This concerns description of the process and equipment, microstructural results and modelling aspects. In this manner a ne...

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Veröffentlicht in:	Materials science forum 2004-01, Vol.457-460, p.175-180
Hauptverfasser:	Smith, M., Pezoldt, Joerg, Anwand, W., Friedberger, A., Panknin, D., Stoemenos, J., Skorupa, Wolfgang, McMahon, R.A., Monteil, Yves, Mestres, Narcis, Godignon, Philippe, Camassel, Jean, Polychroniadis, Efstathios K., Leycuras, André, Ferro, Gabriel, Turover, Daniel, Voelskow, M., Rushworth, S.
Format:	Artikel
Sprache:	eng
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Beschreibung
Zusammenfassung:	This paper summarises latest advancements regarding FLASiC (Flash lamp supported deposition of 3C-SiC) as a new approach to produce high quality SiC-Si heteroepitaxial material. This concerns description of the process and equipment, microstructural results and modelling aspects. In this manner a new era of nanoscale liquid phase epitaxy could be born.
ISSN:	0255-5476 1662-9752 1662-9752
DOI:	10.4028/www.scientific.net/MSF.457-460.175