Mixed stitching interferometry with correction from one-dimensional profile measurements for high-precision X-ray mirrors

This work presents a mixed stitching interferometry method with correction from one-dimensional profile measurements. This method can correct the error of stitching angles among different subapertures using the relatively accurate one-dimensional profiles of the mirror, e.g., provided by the contact...

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Veröffentlicht in:	Optics express 2023-05, Vol.31 (10), p.16330-16347
Hauptverfasser:	Wu, Qiaoyu, Huang, Qiushi, Yu, Jun, Zhu, Yifan, Gu, Weichen, Sheng, Pengfeng, He, Yumei, Luo, Hongxin, Zhang, Zhong, Wang, Zhanshan
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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