CRACK-FREE HIGH-ASPECT-RATIO DRILLING OF GLASSES BY 1 MU M YTTRIUM ALUMINUM GARNET LASER AND TRANSLUCENT ADHESIVE TAPE

CRACK-FREE HIGH-ASPECT-RATIO DRILLING OF GLASSES BY 1 MU M YTTRIUM ALUMINUM GARNET LASER AND TRANSLUCENT ADHESIVE TAPE

Authors succeeded in drilling a crack-free high-aspect-ratio hole through glass using a YAG laser of 1 mu m wavelength, 5 ns pulse width and 30-630 mJ/pulse. The hole is 25.5 mm long with 500 mu m radius and no crack is observed even under atmospheric conditions. This success is due to the use of a...

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Veröffentlicht in:Jpn.J.Appl.Phys ,Part 2. Vol. 43, no. 2A, pp. L133-L135. 2004 Part 2. Vol. 43, no. 2A, pp. L133-L135. 2004, 2004-02, Vol.43 (2A), p.L133-L135
Hauptverfasser: Baasandash, C, Yabe, T, Maehara, J, Yamaguchi, M, Wakatsuki, H
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Sprache:eng
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Zusammenfassung:Authors succeeded in drilling a crack-free high-aspect-ratio hole through glass using a YAG laser of 1 mu m wavelength, 5 ns pulse width and 30-630 mJ/pulse. The hole is 25.5 mm long with 500 mu m radius and no crack is observed even under atmospheric conditions. This success is due to the use of a translucent adhesive tape pasted on the glass surface in which the temperature is controlled and thermal stress is reduced. Computer simulation revealed the mechanism of the phenomena. 6 refs.
ISSN:0021-4922
DOI:10.1143/jjap.43.l133