VCSELs with a self-aligned contact and copper-plated heatsink

VCSELs with a self-aligned contact and copper-plated heatsink

Top-emitting, 850-nm vertical-cavity surface-emitting lasers with a self-aligned top contact and evaporated gold or plated copper heatsink were fabricated and characterized. Thermal resistance was reduced by 44%, and output power and bandwidth were increased by 38% and 12%, respectively. The fabrica...

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Veröffentlicht in:IEEE photonics technology letters 2005-09, Vol.17 (9), p.1767-1769
Hauptverfasser: Al-Omari, A.N., Lear, K.L.
Format: Artikel
Sprache:eng
Schlagworte:
Apertures
Bandwidth
Contact
Contacts
Devices
ELECTRONIC PRODUCTS
Etching
Evaporation
Gold
HEAT SINKS
Modulation
modulation bandwidth
parasitic capacitance
PLATE
PLATING
Polyimides
Semiconductor lasers
Surface emitting lasers
Thermal conductivity
Thermal management
Thermal resistance
three-decibel (3-dB) frequency
Vertical cavity surface emitting lasers
vertical-cavity surface-emitting lasers (VCSELs)
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Zusammenfassung:Top-emitting, 850-nm vertical-cavity surface-emitting lasers with a self-aligned top contact and evaporated gold or plated copper heatsink were fabricated and characterized. Thermal resistance was reduced by 44%, and output power and bandwidth were increased by 38% and 12%, respectively. The fabricated devices exhibit a 3-dB modulation frequency bandwidth up to 16.3 GHz at 10 kA/cm/sup 2/.
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2005.851938