On-axis deflectometric system for freeform surface measurement

We propose an on-axis deflectometric system for the accurate measurement of freeform surfaces with large slope ranges. A miniature plane mirror is attached on the illumination screen to fold the optical path and achieve the on-axis deflectometric testing. Due to the existence of the miniature foldin...

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Veröffentlicht in:Optics letters 2023-04, Vol.48 (8), p.1986-1989
Hauptverfasser: Zhu, Shengtai, Wang, Daodang, Kang, Wenjun, Liang, Rongguang
Format: Artikel
Sprache:eng
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Zusammenfassung:We propose an on-axis deflectometric system for the accurate measurement of freeform surfaces with large slope ranges. A miniature plane mirror is attached on the illumination screen to fold the optical path and achieve the on-axis deflectometric testing. Due to the existence of the miniature folding mirror, the deep-learning method is applied to recover the missing surface data in a single measurement. Low sensitivity to the calibration error of system geometry and high testing accuracy can be achieved with the proposed system. The feasibility and accuracy of the proposed system have been validated. The system is low in cost and simple in configuration, and it provides a feasible way for the flexible and general testing of freeform surfaces, with a significant potential of the application in on-machine testing.
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.486170