Study of pm-SiGe:H thin films for p–i–n devices and tandem solar cells

Polymorphous silicon–germanium (pm-SiGe:H) thin films with Ge contents varying from 1 to 35% were fabricated by plasma enhanced chemical vapour deposition in a high pressure range (1350 mtorr) and under high hydrogen dilution. The electrical and optical properties of these films were studied using a...

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Veröffentlicht in:Thin solid films 2003-03, Vol.427 (1), p.247-251
Hauptverfasser: Gueunier, M.E., Kleider, J.P., Chatterjee, P., Roca i Cabarrocas, P., Poissant, Y.
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Sprache:eng
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Zusammenfassung:Polymorphous silicon–germanium (pm-SiGe:H) thin films with Ge contents varying from 1 to 35% were fabricated by plasma enhanced chemical vapour deposition in a high pressure range (1350 mtorr) and under high hydrogen dilution. The electrical and optical properties of these films were studied using a set of complementary techniques. These materials were then incorporated in the i layer of p–i–n solar cells. The performance of such solar cells and the use of these pm-SiGe alloys as the bottom cell of tandem pm-Si:H/pm-SiGe:H cells are finally discussed with the help of numerical simulations.
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(02)01196-3