High-sensitivity InSb thin-film micro-Hall sensor arrays for simultaneous multiple detection of magnetic beads for biomedical applications
An InSb thin-film linear micro-Hall sensor array of eight sensors, each with a sensitivity of 10 nT/Hz/sup 1/2/ was developed for biomedical applications. The individual Hall sensors had an active area of 5 /spl mu/m/spl times/5 /spl mu/m and were separated by a distance of 5 /spl mu/m. A combinatio...
Gespeichert in:
Veröffentlicht in: | IEEE transactions on magnetics 2005-10, Vol.41 (10), p.3661-3663 |
---|---|
Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!