High-sensitivity InSb thin-film micro-Hall sensor arrays for simultaneous multiple detection of magnetic beads for biomedical applications

An InSb thin-film linear micro-Hall sensor array of eight sensors, each with a sensitivity of 10 nT/Hz/sup 1/2/ was developed for biomedical applications. The individual Hall sensors had an active area of 5 /spl mu/m/spl times/5 /spl mu/m and were separated by a distance of 5 /spl mu/m. A combinatio...

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Veröffentlicht in:	IEEE transactions on magnetics 2005-10, Vol.41 (10), p.3661-3663
Hauptverfasser:	Togawa, K., Sanbonsugi, H., Lapicki, A., Abe, M., Handa, H., Sandhu, A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Biosensors Chemical sensors Cross-disciplinary physics: materials science rheology Exact sciences and technology Hall effect devices Magnetic fields Magnetic films magnetic particles Magnetic sensors Magnetic separation Magnetism Materials science Micromagnetics nanostructure materials Other topics in materials science Physics Sensor arrays SQUIDs Thin film sensors
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Beschreibung
Zusammenfassung:	An InSb thin-film linear micro-Hall sensor array of eight sensors, each with a sensitivity of 10 nT/Hz/sup 1/2/ was developed for biomedical applications. The individual Hall sensors had an active area of 5 /spl mu/m/spl times/5 /spl mu/m and were separated by a distance of 5 /spl mu/m. A combination of these Hall devices and a magnetization system incorporating both dc and ac bias magnetic fields, enabled the simultaneous detection of multiple 2.8 /spl mu/m diameter superparamagnetic beads.
ISSN:	0018-9464 1941-0069
DOI:	10.1109/TMAG.2005.854789