Extreme ultraviolet metalens by vacuum guiding

Extreme ultraviolet (EUV) radiation is a key technology for material science, attosecond metrology, and lithography. Here, we experimentally demonstrate metasurfaces as a superior way to focus EUV light. These devices exploit the fact that holes in a silicon membrane have a considerably larger refra...

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Veröffentlicht in:	Science (American Association for the Advancement of Science) 2023-04, Vol.380 (6640), p.59-63
Hauptverfasser:	Ossiander, Marcus, Meretska, Maryna Leonidivna, Hampel, Hana Kristin, Lim, Soon Wei Daniel, Knefz, Nico, Jauk, Thomas, Capasso, Federico, Schultze, Martin
Format:	Artikel
Sprache:	eng
Schlagworte:	Extreme ultraviolet radiation Optical materials Optics Photolithography Spectroscopy Vacuum Wavelengths
Online-Zugang:	Volltext
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