SU8 photoresist as an etch mask for local deep anodic etching of silicon

For the formation of an ordered porous structure, the distance between two nearest neighbor pores cannot be more than a certain size, otherwise random nucleated pores arise spontaneously between ordered pores. The “proximity effect” does not allow the production of macropores with variable interpore...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Physica status solidi. A, Applied research Applied research, 2003-05, Vol.197 (1), p.150-157
Hauptverfasser: Starkov, V. V., Gavrilin, E. Yu, Konle, J., Presting, H., Vyatkin, A. F., König, U.
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:For the formation of an ordered porous structure, the distance between two nearest neighbor pores cannot be more than a certain size, otherwise random nucleated pores arise spontaneously between ordered pores. The “proximity effect” does not allow the production of macropores with variable interpore distances on the surface of Si wafers. More precisely, it does not allow one to increase arbitrarily the distance between single pores, which is necessary, for example, in the manufacture of photovoltaic devices with improved radiation hardness. Moreover, for many electronic, electromechanical, and optical applications, it is highly desirable to pattern porous silicon in defined two‐ and three‐dimensional geometrical layouts. The simplest solution to such problems is anodic etching through a photoresist mask. In the present work, results on deep anodic etching of silicon through a mask of SU8 photoresist are presented.
ISSN:0031-8965
1521-396X
DOI:10.1002/pssa.200306491