Simple Method for Crystallizing Ceramic Thin Films Using Platinum Bottom Electrodes as Resistive Heating Elements

A simple method for crystallizing amorphous thin films was developed using Pt bottom electrodes as heating elements. A current was applied to chromel wires in contact with the Pt and the temperature was measured using a type K thermocouple. A proportional feedback algorithm was used for controlling the process. The optimum parameters for the temperature control were determined and applied to the crystallization of PZT thin films. The results obtained for a heat treatment at 650 C with a 15 C/s heating and cooling rate showed a pure perovskite phase; the ferroelectric properties were comparable with those from conventional heat treatment methods. 11 refs.